Pfeiffer Vacuum Turbopump Error Err621: Causes & Fixes
Electronic drive unit does not detect the turbopump.
Electronic drive unit does not detect the turbopump.
Excess temperature, motor or pump lower part.
Internal initialization error.
Internal communication error.
Drive fault.
Internal configuration error.
Excess temperature, electronics.
Internal device error.
Drive electronics do not detect the pump.
Internal device or drive electronics fault.
Run-up fault.
Insufficient operating materials.
Connection from electronic drive unit to pump faulty.
Overvoltage.
Overspeed.